Location History:
- Hyogo, JP (1999 - 2004)
- Tokyo, JP (1999 - 2005)
Company Filing History:
5 out of 21,351 
3 out of 3,781 
Years Active: 1999-2005
Title: Akihiro Nakae: Innovator in Semiconductor Technology
Introduction
Akihiro Nakae is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 8 patents. His work focuses on optimizing manufacturing processes and improving exposure conditions for semiconductor devices.
Latest Patents
Nakae's latest patents include a method of manufacturing semiconductor devices that features a multilayer structure. This structure is designed to optimize the configuration of a patterned photoresist. The multilayer structure consists of polysilicon, a silicon oxide film, and an anti-reflective film, which are deposited sequentially. A photoresist is provided on the anti-reflective film, allowing light for exposure to pass through the photoresist. The first step in his method involves determining a range of thickness for the silicon oxide film to ensure that the reflection coefficient of the light at the interface is minimized. The second step delimits this range to ensure that the phase of the reflection coefficient meets specific criteria. Another notable patent is an exposure condition determination system that utilizes a database to store information about past exposures. This system helps determine suitable exposure conditions for new masks based on historical data.
Career Highlights
Throughout his career, Akihiro Nakae has worked with notable companies such as Mitsubishi Electric Corporation and Renesas Technology Corporation. His experience in these organizations has allowed him to develop innovative solutions in semiconductor manufacturing.
Collaborations
Nakae has collaborated with several professionals in his field, including Kouichirou Tsujita and Hironobu Taoka. These collaborations have contributed to the advancement of semiconductor technologies and the successful implementation of his patented methods.
Conclusion
Akihiro Nakae's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative methods continue to shape the future of semiconductor manufacturing.