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Nirasaki, Japan

Akihiro Kikuchi

USPTO Granted Patents = 11

Average Co-Inventor Count = 3.1

ph-index = 7

Forward Citations = 112(Granted Patents)

Location History:

Nirasaki, JP (2007 - 2013)
Yamanashi, JP (2010 - 2017)
Miyagi, JP (2018)

Company Filing History:

11 out of 10,317

Tokyo Electron Limited

Years Active: 2007-2018

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11 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9925571 - Method of cleaning substrate processing apparatus (2018-03-27),

2. 9728381 - Plasma processor and plasma processing method (2017-08-08),

3. 9437402 - Plasma processor and plasma processing method (2016-09-06),

4. 8904957 - Plasma processor and plasma processing method (2014-12-09),

5. 8387562 - Plasma processor and plasma processing method (2013-03-05),

6. 8263498 - Semiconductor device fabricating method, plasma processing system and storage medium (2012-09-11),

7. 8056503 - Plasma procesor and plasma processing method (2011-11-15),

8. 7794617 - Plasma etching method, plasma processing apparatus, control program and computer readable storage medium (2010-09-14),

9. 7700492 - Plasma etching method and apparatus, control program and computer-readable storage medium storing the control program (2010-04-20),

10. 7655570 - Etching method, program, computer readable storage medium and plasma processing apparatus (2010-02-02),

11. 7303690 - Microlens forming method (2007-12-04),

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