Location History:
- Prides Crossing, MA (US) (1987)
- Lincoln, MA (US) (1983 - 2001)
Company Filing History:
6 out of 5,989 
2 out of 400 
1 out of 29 
Years Active: 1983-2001
Introduction
A Stuart Denholm is a prominent inventor based in Lincoln, MA, known for his significant contributions to the field of ion implantation technology. With a remarkable portfolio of 10 patents, Denholm's work focuses on improving energy efficiency and consistency in implantation processes, which are crucial for semiconductor manufacturing.
Latest Patents
Among his latest innovations is a system designed for improving energy purity and implant consistency, specifically aimed at minimizing charge accumulation on implanted substrates. This inventive method involves a plasma immersion ion implantation system that maintains uniformity in energy distribution during implantation. The technique utilizes a voltage modulator to apply a pulsed voltage signal, effectively attracting ions in the plasma to be implanted into a wafer. By ensuring that only ions within a specific energy range are implanted, this approach enhances implant energy distribution while neutralizing wafer charge during the process.
Another noteworthy patent involves a dual-walled exhaust assembly for ion implantation systems, designed to connect components at different voltage potentials safely. This assembly features a disposable corrugated inner tube and a permanent outer tube made from dielectric material that minimizes the risk of contamination and electrical discharge, ensuring a safer operational environment.
Career Highlights
Denholm has made substantial contributions during his tenure at various organizations, including Eaton Corporation and Axcelis Technologies, Inc. His expertise in ion implantation technology has positioned him as a leading figure in advancing semiconductor manufacturing processes.
Collaborations
Throughout his career, Denholm has collaborated with notable professionals in the industry, including Peter Lawrence Kellerman and William A. Frutiger. These collaborations have further enhanced his innovation capabilities and contributed to the development of new technologies.
Conclusion
A Stuart Denholm's innovative work continues to impact the field of ion implantation, significantly advancing semiconductor technology. With his numerous patents and collaborations, he remains a key inventor driving innovations that enhance efficiency and safety in device manufacturing processes.