The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 1992
Filed:
Mar. 13, 1991
Applicant:
Inventor:
A Stuart Denholm, Lincoln, MA (US);
Assignee:
Eaton Corporation, Cleveland, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2504922 ; 250398 ;
Abstract
An ion beam implanter having a remote ion beam collector to reduce particulate contamination in the region of the implant chamber. A resolving magnet is activated during implantation to bend ions that exit a source to a trajectory leading to an ion implantation chamber. By de-activating the resolving magnet when not implanting, ions from the source follow a linear path to the ion beam collector.