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Gwent, United Kingdom

Surface Technology Systems Plc

USPTO Granted Patents = 19

% Expired Patents = 5.3

EPO Patents = 2

Forward Citations = 622

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21 inventors (with patents filed for the assignee):

Jyoti Kiron Bhardwaj (12 out of 12 patents)

Leslie Michael Lea (10 out of 11 patents)

Huma Ashraf (3 out of 13 patents)

4. Janet Hopkins (3 out of 8 patents)

5. Alan Michael Hynes (3 out of 3 patents)

6. Edward Guibarra (2 out of 2 patents)

7. Nicholas Shepherd (2 out of 2 patents)

8. Andrew Duncan McQuarrie (2 out of 2 patents)

9. David Mark Haynes (2 out of 2 patents)

10. Martin Edward Ryan (2 out of 2 patents)

11. Babak Khamsehpour (2 out of 2 patents)

12. Tudor Thomas (1 out of 6 patents)

13. Jyoti Kiron Bhardwaj (1 out of 35 patents)

14. Lee Campbell Boman (1 out of 15 patents)

15. Graham Hodgson (1 out of 9 patents)

19 patents: Sort by Forward Citations

1. 7491649 - Plasma processing apparatus (2009-02-17),

2. 7306745 - Method and apparatus for stabilizing a plasma (2007-12-11),

3. 7141504 - Method and apparatus for anisotropic etching (2006-11-28),

4. 6933242 - Plasma etching (2005-08-23),

5. 6929784 - Chlorotrifuorine gas generator system (2005-08-16),

6. 6926871 - Gas generation system (2005-08-09),

7. 6628500 - Method and apparatus for dechucking a substrate from an electrostatic chuck (2003-09-30),

8. 6602433 - Gas delivery system (2003-08-05),

9. 6602384 - Plasma processing apparatus (2003-08-05),

10. 6534922 - Plasma processing apparatus (2003-03-18),

11. 6458239 - Plasma processing apparatus (2002-10-01),

12. 6409876 - Apparatus for etching a workpiece (2002-06-25),

13. 6355181 - Method and apparatus for manufacturing a micromechanical device (2002-03-12),

14. 6261962 - Method of surface treatment of semiconductor substrates (2001-07-17),

15. 6259209 - Plasma processing apparatus with coils in dielectric windows (2001-07-10),

Surface Technology Systems PLC is a provider of advanced etch and deposition systems for semiconductor and related markets. They offer a wide range of solutions including plasma etch and deposition systems, surface conditioning and cleaning systems, and thermal processing systems. With a commitment to technological innovation and customer satisfaction, Surface Technology Systems PLC has established itself as a leader in the industry.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Sep 22 2026

19 Patents

#2 in Gwent

#924 in United Kingdom

#32,571 in the World

Gwent, United Kingdom

Surface Technology Systems Plc

Forward Citations = 622

21 inventors:

Jyoti Kiron Bhardwaj (12 out of 12 patents)

Leslie Michael Lea (10 out of 11 patents)

Huma Ashraf (3 out of 13 patents)

4. Janet Hopkins (3 out of 8 patents)

5. Alan Michael Hynes (3 out of 3 patents)

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