For the Inventor, By the Inventor

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Santa Clara, CA, United States of America

Multibeam Corporation

USPTO Granted Patents = 18

Forward Citations = 269

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13 inventors (with patents filed for the assignee):

Kevin M Monahan (12 out of 33 patents)

Theodore A Prescop (12 out of 26 patents)

David K Lam (12 out of 28 patents)

4. Michael C Smayling (6 out of 226 patents)

5. Cong Tran (6 out of 6 patents)

6. N William Parker (4 out of 18 patents)

7. Enden David Liu (2 out of 2 patents)

8. Edward Yin (1 out of 9 patents)

9. John C Wiesner (1 out of 1 patent)

10. S Daniel Miller (1 out of 6 patents)

11. Frank Ching-Feng Tsai (1 out of 3 patents)

12. Tirunelveli Subramaniam Ravi (1 out of 22 patents)

13. Jeffery Michael Dech (1 out of 1 patent)

18 patents: Sort by Forward Citations

1. 12451325 - Charged particle beam axial calibration (2025-10-21),

2. 9673114 - Precision substrate material removal using miniature-column charged particle beam arrays (2017-06-06),

3. 9620332 - Charged particle beam substrate inspection using both vector and raster scanning (2017-04-11),

4. 9595419 - Alignment and registration targets for multiple-column charged particle beam lithography and inspection (2017-03-14),

5. 9556521 - Precision deposition using miniature-column charged particle beam arrays (2017-01-31),

6. 9478395 - Alignment and registration targets for multiple-column charged particle beam lithography and inspection (2016-10-25),

7. 9466464 - Precision substrate material removal using miniature-column charged particle beam arrays (2016-10-11),

8. 9466463 - Charged particle beam substrate inspection using both vector and raster scanning (2016-10-11),

9. 9453281 - Precision deposition using miniature-column charged particle beam arrays (2016-09-27),

10. 9207539 - Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems (2015-12-08),

11. 9184027 - Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp (2015-11-10),

12. 8999628 - Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems (2015-04-07),

13. 8999627 - Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp (2015-04-07),

14. 8384048 - Charged particle beam deflection method with separate stage tracking and stage positional error signals (2013-02-26),

15. 8242457 - Charged particle optics with azimuthally-varying third-order aberrations for generation of shaped beams (2012-08-14),

Multibeam Corporation is a technology company specializing in advanced imaging solutions for various industries. With expertise in multibeam sonar technology, the company provides cutting-edge products and services for underwater exploration and mapping. Multibeam Corporation's innovative solutions offer high-resolution imaging, precise data collection, and efficient underwater surveys. Through continuous research and development, the company is committed to pushing the boundaries of imaging technology and delivering exceptional results to clients worldwide.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

18 Patents

#227 in Santa Clara, CA

#4,156 in California

#17,417 in US

#33,187 in the World

Santa Clara, CA, United States of America

Multibeam Corporation

Forward Citations = 269

13 inventors:

Kevin M Monahan (12 out of 33 patents)

Theodore A Prescop (12 out of 26 patents)

David K Lam (12 out of 28 patents)

4. Michael C Smayling (6 out of 226 patents)

5. Cong Tran (6 out of 6 patents)

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