Company Filing History:
Years Active: 2004-2005
Title: Frank Ching-Feng Tsai: Innovator in Electron Beam Inspection Technology
Introduction
Frank Ching-Feng Tsai is a notable inventor based in Saratoga, CA (US). He has made significant contributions to the field of semiconductor technology, particularly in electron beam inspection systems. With a total of 3 patents, Tsai's work has advanced the capabilities of semiconductor manufacturing processes.
Latest Patents
One of Tsai's latest patents is the Multi-beam multi-column electron beam inspection system. This innovative system is designed for the electron beam inspection of semiconductor wafers, providing a throughput high enough for in-line use. The system incorporates field emission electron sources, electrostatic electron optical columns, and a wafer stage with six degrees of freedom of movement. Additionally, it features image storage and processing systems capable of handling multiple simultaneous image data streams. Each electron optical column is enhanced with an electron gun that includes redundant field emission sources, a voltage contrast plate for voltage contrast imaging of wafers, and an electron optical design that ensures high efficiency in secondary electron collection.
Career Highlights
Throughout his career, Frank Tsai has worked with several companies, including Multibeam Systems Inc. and Multibeam Corporation. His experience in these organizations has allowed him to refine his expertise in electron beam technologies and contribute to the development of advanced inspection systems.
Collaborations
Tsai has collaborated with notable professionals in the field, including Edward Yin and N William Parker. These collaborations have further enriched his work and have led to advancements in the technologies he has developed.
Conclusion
Frank Ching-Feng Tsai is a distinguished inventor whose work in electron beam inspection technology has made a significant impact on the semiconductor industry. His innovative patents and collaborations highlight his commitment to advancing technology in this critical field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.