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For the Inventor, By the Inventor

Göttingen, Germany

Lambda Physik Ag

Calculating rank
USPTO Granted Patents = 150

% Expired Patents = 37.3

Forward Citations = 1,416

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90 inventors (with patents filed for the assignee):

goldMedal Uwe Stamm (43 out of 59 patents)

silverMedal Sergei V Govorkov (36 out of 79 patents)

bronzeMedal Klaus Wolfgang Vogler (29 out of 66 patents)

4.  Juergen Kleinschmidt (25 out of 50 patents)

5.  Igor Bragin (19 out of 27 patents)

6.  Peter Heist (16 out of 19 patents)

7.  Hans-Stephan Albrecht (15 out of 17 patents)

8.  Frank Voss (15 out of 15 patents)

9.  Peter Lokai (13 out of 20 patents)

10.  Thomas Schroeder (12 out of 17 patents)

11.  Dirk Basting (12 out of 18 patents)

12.  Ulrich Rebhan (12 out of 15 patents)

13.  Jürgen Kleinschmidt (12 out of 12 patents)

14.  Vadim Berger (11 out of 16 patents)

15.  Wolfgang Zschocke (9 out of 12 patents)


Core Competencies:
Excimer Laser
Molecular Fluorine Laser
Gas Replenishment
Wavelength Calibration
Precision Timing
Energy Stabilization
Spectral Purity
Temperature Control
Laser Diagnostics
Optical Components
Beam Parameter Monitoring
Line-Narrowing Optics

150 patents:

1. 7366213 - MOPA excimer or molecular fluorine laser system with improved synchronization (2008-04-29),
2. 7308013 - Excimer or molecular fluorine laser system with precision timing (2007-12-11),
3. 7266137 - Laser gas replenishment method (2007-09-04),
4. 7245420 - Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime (2007-07-17),
5. 7227881 - Master oscillator—power amplifier excimer laser system (2007-06-05),
6. 7184204 - Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime (2007-02-27),
7. 7164703 - Temperature control systems for excimer lasers (2007-01-16),
8. 7158553 - Master oscillator/power amplifier excimer laser system with pulse energy and pointing control (2007-01-02),
9. 7079565 - Systems and methods utilizing laser discharge electrodes with ceramic spoilers (2006-07-18),
10. 7075963 - Tunable laser with stabilized grating (2006-07-11),
11. 7006541 - Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp (2006-02-28),
12. 6999492 - Reduced-maintenance excimer laser with oil-free solid state pulser (2006-02-14),
13. 6998620 - Stable energy detector for extreme ultraviolet radiation detection (2006-02-14),
14. 6993052 - System and method for delay compensation for a pulsed laser (2006-01-31),
15. 6987790 - Excimer or molecular fluorine laser with several discharge chambers (2006-01-17),
Company Overview
Lambda Physik AG, based in Göttingen, Germany, specializes in excimer laser technology, focusing on the development and manufacturing of advanced laser systems. The company is recognized for its expertise in molecular fluorine lasers, which are pivotal in various applications, including semiconductor manufacturing and material processing. Key technological areas include gas replenishment, wavelength calibration, precision timing, energy stabilization, spectral purity, and temperature control, ensuring high performance and reliability in laser operations.
Profile summary synthesized from public USPTO records and patent filings.

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USPTO Data Jan 1 1976 - Nov 3 2026

150 Patents

#2 in Göttingen

#405 in Germany

#5,442 in the World

Göttingen, DE
Göttingen, Germany

Lambda Physik Ag

Forward Citations = 1,416

90 inventors:

goldMedal Uwe Stamm (43 out of 59 patents)

silverMedal Sergei V Govorkov (36 out of 79 patents)

bronzeMedal Klaus Wolfgang Vogler (29 out of 66 patents)

4.  Juergen Kleinschmidt (25 out of 50 patents)

5.  Igor Bragin (19 out of 27 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Lambda Physik Ag. Retrieved from https://idiyas.com/company/lambda-physik-ag

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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