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Göttingen, Germany

Lambda Physik Ag

USPTO Granted Patents = 150

% Expired Patents = 37.3

Forward Citations = 1,408

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90 inventors (with patents filed for the assignee):

Uwe Stamm (43 out of 59 patents)

Sergei V Govorkov (36 out of 79 patents)

Klaus Wolfgang Vogler (29 out of 66 patents)

4. Juergen Kleinschmidt (25 out of 50 patents)

5. Igor Bragin (19 out of 27 patents)

6. Peter Heist (16 out of 19 patents)

7. Hans-Stephan Albrecht (15 out of 17 patents)

8. Frank Voss (15 out of 15 patents)

9. Peter Lokai (13 out of 20 patents)

10. Thomas Schroeder (12 out of 17 patents)

11. Dirk Basting (12 out of 18 patents)

12. Ulrich Rebhan (12 out of 15 patents)

13. Jürgen Kleinschmidt (12 out of 12 patents)

14. Vadim Berger (11 out of 16 patents)

15. Wolfgang Zschocke (9 out of 12 patents)

Core Competencies:

Excimer Laser

Molecular Fluorine Laser

Gas Replenishment

Wavelength Calibration

Precision Timing

Energy Stabilization

Spectral Purity

Temperature Control

Laser Diagnostics

Optical Components

Beam Parameter Monitoring

Line-Narrowing Optics

150 patents: Sort by Forward Citations

1. 7366213 - MOPA excimer or molecular fluorine laser system with improved synchronization (2008-04-29),

2. 7308013 - Excimer or molecular fluorine laser system with precision timing (2007-12-11),

3. 7266137 - Laser gas replenishment method (2007-09-04),

4. 7245420 - Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime (2007-07-17),

5. 7227881 - Master oscillator—power amplifier excimer laser system (2007-06-05),

6. 7184204 - Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime (2007-02-27),

7. 7164703 - Temperature control systems for excimer lasers (2007-01-16),

8. 7158553 - Master oscillator/power amplifier excimer laser system with pulse energy and pointing control (2007-01-02),

9. 7079565 - Systems and methods utilizing laser discharge electrodes with ceramic spoilers (2006-07-18),

10. 7075963 - Tunable laser with stabilized grating (2006-07-11),

11. 7006541 - Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp (2006-02-28),

12. 6999492 - Reduced-maintenance excimer laser with oil-free solid state pulser (2006-02-14),

13. 6998620 - Stable energy detector for extreme ultraviolet radiation detection (2006-02-14),

14. 6993052 - System and method for delay compensation for a pulsed laser (2006-01-31),

15. 6987790 - Excimer or molecular fluorine laser with several discharge chambers (2006-01-17),

Lambda Physik AG is a leading manufacturer of advanced excimer lasers for scientific, industrial, and medical applications. With a rich history of innovation dating back over 40 years, Lambda Physik continues to deliver cutting-edge solutions in laser technology. Our products are renowned for their exceptional performance and reliability, enabling diverse applications including lithography, materials processing, medical diagnostics, and more. Visit our website to learn more about our range of excimer laser systems and the industries we serve.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Sep 22 2026

150 Patents

#2 in Göttingen

#403 in Germany

#5,428 in the World

Göttingen, Germany

Lambda Physik Ag

Forward Citations = 1,408

90 inventors:

Uwe Stamm (43 out of 59 patents)

Sergei V Govorkov (36 out of 79 patents)

Klaus Wolfgang Vogler (29 out of 66 patents)

4. Juergen Kleinschmidt (25 out of 50 patents)

5. Igor Bragin (19 out of 27 patents)

Please report any incorrect information to [email protected]

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