The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2007
Filed:
Feb. 12, 2004
Rainer Paetzel, Dransfeld, DE;
Rainer Paetzel, Dransfeld, DE;
Lambda Physik AG, Goettingen, DE;
Abstract
Improved temperature stabilization can be obtained for pulsed gas discharge laser systems, such as excimer laser systems, using information about the energy dissipation of the system. Temperature sensors have a limited response time, which can lead to undesirable instability in gas temperature. By determining the heat energy provided to the discharge chamber over sufficiently small periods of time, a system controller can account for rapid variations in the temperature of the laser gas. The temperature regulation controller can adjust a flow of cooling liquid into the discharge chamber to account for these rapid variations on a scale that is much shorter than the response time of the temperature sensors. For variations over longer periods of time, the temperature regulation controller can utilize an active heater in contact with the laser tube to heat the laser tube body, thereby uniformly heating the gas in the tube.