The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Feb. 11, 2004
Sergei V. Govorkov, Boca Raton, FL (US);
Alexander O. Wiessner, Coconut Creek, FL (US);
Rainer Paetzel, Dransfeld, DE;
Igor Bragin, Goettingen, DE;
Sergei V. Govorkov, Boca Raton, FL (US);
Alexander O. Wiessner, Coconut Creek, FL (US);
Rainer Paetzel, Dransfeld, DE;
Igor Bragin, Goettingen, DE;
Lambda Physik AG, Goettingen, DE;
Abstract
Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.