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For the Inventor, By the Inventor

Goleta, CA, United States of America

Innovative Micro Technology


USPTO Granted Patents = 82



Trademarks = 2

Forward Citations = 531

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37 inventors (with patents filed for the assignee):

goldMedal John Stuart Foster (31 out of 52 patents)

silverMedal Christopher S Gudeman (24 out of 54 patents)

bronzeMedal Paul Rubel (24 out of 27 patents)

4.  Jeffery Frank Summers (21 out of 23 patents)

5.  John Harley (10 out of 12 patents)

6.  Gregory A Carlson (10 out of 11 patents)

7.  Alok Paranjpye (8 out of 8 patents)

8.  Douglas L Thompson (8 out of 8 patents)

9.  Jaquelin K Spong (7 out of 9 patents)

10.  Benedikt Zeyen (6 out of 8 patents)

11.  David M Erlach (6 out of 9 patents)

12.  Steven H Hovey (6 out of 11 patents)

13.  Richard Thomas Martin (6 out of 17 patents)

14.  Kimon Rybnicek (5 out of 6 patents)

15.  Patrick Edward Feierabend (5 out of 6 patents)


Core Competencies:
MEMS Switch
Microfabricated Spectrometer
Gas Sensor
Optical Apparatus
Pressure Transducer
Electromagnetic Actuator
Particle Sorting Actuator
Wafer Bonding
Thermal Device
Substrate Anodic Bonding
Etching Technique
Hermetic Bonding

82 patents:

1. 11594389 - MEMS dual substrate switch with magnetic actuation (2023-02-28),
2. 11502669 - Subterahertz microfabricated spectrometer (2022-11-15),
3. 11309837 - Resonant filter using mm wave cavity (2022-04-19),
4. 11305982 - Eight spring dual substrate MEMS plate switch and method of manufacture (2022-04-19),
5. 11258425 - Microfabricated notch filter (2022-02-22),
6. 10955336 - Gas sensor comprising a rotatable Fabry-Perot multilayer etalon (2021-03-23),
7. 10826153 - Resonant filter using mm wave cavity (2020-11-03),
8. 10804850 - Gas sensor using mm wave cavity (2020-10-13),
9. 10388468 - Contact material for MEMS devices (2019-08-20),
10. 10302871 - Microfabricated fiber optic platform (2019-05-28),
11. 10291332 - Self-aligned silicon fiber optic connector (2019-05-14),
12. 10050409 - Microfabricated optical apparatus with grounded metal layer (2018-08-14),
13. 10017381 - Microfabricated pressure transducer (2018-07-10),
14. 10011478 - Thermocompression bonding with raised feature (2018-07-03),
15. 9953787 - Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture (2018-04-24),
Innovative Micro Technology (IMT) is a leading manufacturer of MEMS technology and products. With over two decades of experience, IMT specializes in providing custom MEMS solutions for a wide range of applications. Their expertise includes design, fabrication, and packaging of MEMS sensors, actuators, and microfluidic devices. IMT's state-of-the-art facilities and advanced manufacturing capabilities enable them to deliver high-quality and reliable MEMS solutions to their global customers. Visit their website to learn more about their innovative products and services.
This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 23 2025

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82 Patents

#11 in Goleta, CA

#1,032 in California

#4,354 in US

#8,909 in the World

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Goleta, CA, United States of America

Innovative Micro Technology

Forward Citations = 531

37 inventors:

goldMedal John Stuart Foster (31 out of 52 patents)

silverMedal Christopher S Gudeman (24 out of 54 patents)

bronzeMedal Paul Rubel (24 out of 27 patents)

4.  Jeffery Frank Summers (21 out of 23 patents)

5.  John Harley (10 out of 12 patents)

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