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For the Inventor, By the Inventor

Goleta, CA, United States of America

Innovative Micro Technology


USPTO Granted Patents = 82

% Expired Patents = 34.1



Trademarks = 2

Forward Citations = 546

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37 inventors (with patents filed for the assignee):

goldMedal John Stuart Foster (31 out of 53 patents)

silverMedal Christopher S Gudeman (24 out of 54 patents)

bronzeMedal Paul Rubel (24 out of 27 patents)

4.  Jeffery Frank Summers (21 out of 23 patents)

5.  John Harley (10 out of 12 patents)

6.  Gregory A Carlson (10 out of 11 patents)

7.  Alok Paranjpye (8 out of 8 patents)

8.  Douglas L Thompson (8 out of 8 patents)

9.  Jaquelin K Spong (7 out of 9 patents)

10.  Benedikt Zeyen (6 out of 8 patents)

11.  David M Erlach (6 out of 9 patents)

12.  Steven H Hovey (6 out of 11 patents)

13.  Richard Thomas Martin (6 out of 17 patents)

14.  Kimon Rybnicek (5 out of 6 patents)

15.  Patrick Edward Feierabend (5 out of 6 patents)


Core Competencies:
MEMS Switch
Microfabricated Sensors
Gas Sensor
Optical Apparatus
Thermal Actuator
Particle Sorting
Substrate Bonding
Resonant Filter
Electromagnetic Actuator
Pressure Transducer
Etching Technique
Hysteretic Device

82 patents:

1. 11594389 - MEMS dual substrate switch with magnetic actuation (2023-02-28),
2. 11502669 - Subterahertz microfabricated spectrometer (2022-11-15),
3. 11309837 - Resonant filter using mm wave cavity (2022-04-19),
4. 11305982 - Eight spring dual substrate MEMS plate switch and method of manufacture (2022-04-19),
5. 11258425 - Microfabricated notch filter (2022-02-22),
6. 10955336 - Gas sensor comprising a rotatable Fabry-Perot multilayer etalon (2021-03-23),
7. 10826153 - Resonant filter using mm wave cavity (2020-11-03),
8. 10804850 - Gas sensor using mm wave cavity (2020-10-13),
9. 10388468 - Contact material for MEMS devices (2019-08-20),
10. 10302871 - Microfabricated fiber optic platform (2019-05-28),
11. 10291332 - Self-aligned silicon fiber optic connector (2019-05-14),
12. 10050409 - Microfabricated optical apparatus with grounded metal layer (2018-08-14),
13. 10017381 - Microfabricated pressure transducer (2018-07-10),
14. 10011478 - Thermocompression bonding with raised feature (2018-07-03),
15. 9953787 - Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture (2018-04-24),
Company Overview
Innovative Micro Technology, based in Goleta, California, specializes in the development and manufacturing of Micro-Electro-Mechanical Systems (MEMS). The company focuses on a range of advanced technologies, including MEMS switches, microfabricated sensors, and gas sensors. Their expertise extends to optical apparatus, thermal actuators, particle sorting, substrate bonding, and resonant filters, positioning them as a key player in the MEMS technology landscape. Their innovations cater to diverse applications across various industries.
Profile summary synthesized from public USPTO records and patent filings.

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USPTO Data Jan 1 1976 - Oct 20 2026

Innovative Micro Technology USPTO Patent Assignee Logo
82 Patents

#11 in Goleta, CA

#1,049 in California

#4,528 in US

#9,264 in the World

Goleta, CA (US)
Goleta, CA, United States of America

Innovative Micro Technology

Forward Citations = 546

37 inventors:

goldMedal John Stuart Foster (31 out of 53 patents)

silverMedal Christopher S Gudeman (24 out of 54 patents)

bronzeMedal Paul Rubel (24 out of 27 patents)

4.  Jeffery Frank Summers (21 out of 23 patents)

5.  John Harley (10 out of 12 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Innovative Micro Technology. Retrieved from https://idiyas.com/company/innovative-micro-technology

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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