The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 2023

Filed:

Mar. 15, 2021
Applicant:

Innovative Micro Technology, Goleta, CA (US);

Inventors:

Christopher S Gudeman, Lompoc, CA (US);

Marin Sigurdson, Goleta, CA (US);

Assignee:

Innovative Micro Technology, Goleta, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 50/00 (2006.01); H01H 50/54 (2006.01); H01H 49/00 (2006.01); H01H 50/36 (2006.01); H01H 50/64 (2006.01);
U.S. Cl.
CPC ...
H01H 50/005 (2013.01); H01H 49/00 (2013.01); H01H 50/36 (2013.01); H01H 50/54 (2013.01); H01H 50/641 (2013.01);
Abstract

Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A shunt bar on the movable plate may close the switch when lowered onto the contacts. The switch may generally be closed, with the shunt bar resting on the contacts. However, a magnetically permeable material may also be inlaid into the movable plate. The switch may then be opened by placing either a permanent magnet or an electromagnet in proximity to the switch.


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