The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2019
Filed:
Nov. 18, 2016
Applicant:
Innovative Micro Technology, Goleta, CA (US);
Inventors:
Suresh Sampath, Santa Barbara, CA (US);
Christopher S. Gudeman, Lompoc, CA (US);
Assignee:
Innovative Micro Technology, Goleta, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 1/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
H01H 1/0036 (2013.01); B81C 1/00095 (2013.01); B81C 1/00166 (2013.01); B81B 2201/018 (2013.01); H01H 2001/0052 (2013.01); H01H 2001/0057 (2013.01);
Abstract
A method for forming electrical contacts on a semiconductor substrate is disclosed. The method includes forming a first metal layer over the substrate, and forming a layer of a second metal oxide by sputter deposition of a second metal in an oxygen environment. In some embodiments, the second metal oxide may be ruthenium dioxide, and the first metal layer may be gold, copper, platinum, silver or aluminum.