Company Filing History:
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Title: The Innovative Contributions of Suresh Sampath in MEMS Technology
Introduction
Suresh Sampath, an accomplished inventor based in Santa Barbara, California, has made significant contributions in the field of microelectronics, specifically in Micro-Electro-Mechanical Systems (MEMS) technology. With a total of four patents to his name, Sampath's work demonstrates a commitment to advancing innovation in the semiconductor industry.
Latest Patents
One of Sampath's latest patents is focused on a **Contact Material for MEMS Devices**. This method outlines a procedure for forming electrical contacts on a semiconductor substrate by first establishing a metal layer and subsequently applying a second metal oxide through sputter deposition in an oxygen environment. Notably, ruthenium dioxide can serve as the second metal oxide, while the first layer may consist of gold, copper, platinum, silver, or aluminum.
Another remarkable patent is his **Method for Forming a Microfabricated Structure**. This invention covers a process that includes forming a liftoff material layer and a photoresist layer, which are then selectively developed. This unique approach allows for precise openings where the first opening is smaller than the second due to differing developing rates. As a result, dry etching or ion milling techniques can be employed effectively, leaving a clean, pattern-defined device layer without unwanted residues.
Career Highlights
Sampath has demonstrated his expertise through his tenure at several esteemed organizations, including Innovative Micro Technology. His work has been critical in shaping the modern landscape of MEMS applications.
Collaborations
Throughout his career, Suresh Sampath has had the opportunity to collaborate with esteemed professionals in the field, including Charles L. Goldsmith and Orlando H. Auciello. These partnerships have fostered an environment of innovation and have contributed to the advancement of technology in MEMS.
Conclusion
Suresh Sampath's innovative patents and collaborative spirit highlight his dedication to the field of microelectronics. His remarkable contributions continue to impact the evolution of MEMS technologies, showcasing the importance of inventors in driving advancements that shape our technological landscape.
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