The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
May. 24, 2011
Charles L. Goldsmith, Plano, TX (US);
Orlando H. Auciello, Bolingbrook, IL (US);
Anirudha V. Sumant, Plainfield, IL (US);
Derrick C. Mancini, Argonne, IL (US);
Chris Gudeman, Lompoc, CA (US);
Suresh Sampath, Santa Barbara, CA (US);
John A. Carlilse, Romeoville, IL (US);
Robert W. Carpick, Philadelphia, PA (US);
James Hwang, Bethlehem, PA (US);
Charles L. Goldsmith, Plano, TX (US);
Orlando H. Auciello, Bolingbrook, IL (US);
Anirudha V. Sumant, Plainfield, IL (US);
Derrick C. Mancini, Argonne, IL (US);
Chris Gudeman, Lompoc, CA (US);
Suresh Sampath, Santa Barbara, CA (US);
John A. Carlilse, Romeoville, IL (US);
Robert W. Carpick, Philadelphia, PA (US);
James Hwang, Bethlehem, PA (US);
Other;
Abstract
The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.