The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2018
Filed:
Apr. 03, 2017
Applicant:
Innovative Micro Technology, Goleta, CA (US);
Inventor:
Benedikt Zeyen, Santa Barbara, CA (US);
Assignee:
Innovative Micro Technology, Goleta, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 7/22 (2006.01); G01L 7/24 (2006.01); B81C 1/00 (2006.01); G01L 7/16 (2006.01); G01L 7/02 (2006.01); G01L 9/00 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00182 (2013.01); B81B 3/0018 (2013.01); G01L 7/022 (2013.01); G01L 7/024 (2013.01); G01L 7/026 (2013.01); G01L 7/163 (2013.01); G01L 9/0001 (2013.01); G01L 9/0089 (2013.01); B81B 2201/0264 (2013.01); B81C 2201/01 (2013.01);
Abstract
A microfabricated pressure transducer is formed in a multilayer substrate by etching a plurality of shallow and deep wells into the layers, and then joining these wells with voids formed by anisotropic etching. The voids define a flexible membrane over the substrate which deforms when a force is applied.