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North Billerica, MA, United States of America

Btu Engineering Corporation

USPTO Granted Patents = 25

Forward Citations = 1,751

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17 inventors (with patents filed for the assignee):

Jacob Howard Beck (8 out of 9 patents)

Arthur Waugh (5 out of 7 patents)

Robert F Sarkozy (5 out of 6 patents)

4. Daniel J Fisher (3 out of 4 patents)

5. John H Fabricius (3 out of 3 patents)

6. Gary A Orbeck (2 out of 17 patents)

7. Morris Simson (2 out of 2 patents)

8. James W Proscia (1 out of 22 patents)

9. Martin I Soderlund (1 out of 3 patents)

10. Donald Landis (1 out of 2 patents)

11. R Chester Pray (1 out of 1 patent)

12. Martin A Beck (1 out of 1 patent)

13. Donald G Landis (1 out of 1 patent)

14. Willard J Lucey (1 out of 1 patent)

15. Forest S Goldsmith (1 out of 1 patent)

25 patents: Sort by Forward Citations

1. 5124180 - Method for the formation of fluorine doped metal oxide films (1992-06-23),

2. 4872799 - Boat transfer and queuing furnace elevator and method (1989-10-10),

3. 4854266 - Cross-flow diffusion furnace (1989-08-08),

4. 4829282 - High efficiency high heat output electrical heater assembly (1989-05-09),

5. 4802441 - Double wall fast cool-down furnace (1989-02-07),

6. 4753192 - Movable core fast cool-down furnace (1988-06-28),

7. 4752219 - Wafer softlanding system and cooperative door assembly (1988-06-21),

8. 4701096 - Wafer handling station (1987-10-20),

9. 4687911 - Electric furnace heater (1987-08-18),

10. 4672997 - Modular, self-diagnostic mass-flow controller and system (1987-06-16),

11. 4624638 - CVD boat loading mechanism having a separable, low profile cantilevered (1986-11-25),

12. 4586898 - Multi-zone furnace system (1986-05-06),

13. 4573431 - Modular V-CVD diffusion furnace (1986-03-04),

14. 4556584 - Method for providing substantially waste-free chemical vapor deposition (1985-12-03),

15. 4484538 - Apparatus for providing depletion-free uniform thickness CVD thin-film (1984-11-27),

BTU Engineering Corporation is a leading provider of engineering solutions, specializing in innovative energy and sustainability solutions for various industries. With a team of highly skilled engineers and technicians, we offer a wide range of services including energy audits, HVAC system design, renewable energy systems integration, and project management. Our commitment to quality and client satisfaction has earned us a strong reputation in the industry. Visit our website to learn more about our services and how we can help meet your engineering needs.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Sep 15 2026

25 Patents

#7 in North Billerica, MA

#799 in Massachusetts

#13,321 in US

#25,618 in the World

North Billerica, MA, United States of America

Btu Engineering Corporation

Forward Citations = 1,751

17 inventors:

Jacob Howard Beck (8 out of 9 patents)

Arthur Waugh (5 out of 7 patents)

Robert F Sarkozy (5 out of 6 patents)

4. Daniel J Fisher (3 out of 4 patents)

5. John H Fabricius (3 out of 3 patents)

Please report any incorrect information to [email protected]

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