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North Billerica, MA, United States of America

Btu Engineering Corporation

USPTO Granted Patents = 25

Forward Citations = 1,751

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17 inventors (with patents filed for the assignee):

Jacob Howard Beck (8 out of 9 patents)

Arthur Waugh (5 out of 7 patents)

Robert F Sarkozy (5 out of 6 patents)

4. Daniel J Fisher (3 out of 4 patents)

5. John H Fabricius (3 out of 3 patents)

6. Gary A Orbeck (2 out of 17 patents)

7. Morris Simson (2 out of 2 patents)

8. James W Proscia (1 out of 22 patents)

9. Martin I Soderlund (1 out of 3 patents)

10. Donald Landis (1 out of 2 patents)

11. R Chester Pray (1 out of 1 patent)

12. Martin A Beck (1 out of 1 patent)

13. Donald G Landis (1 out of 1 patent)

14. Willard J Lucey (1 out of 1 patent)

15. Forest S Goldsmith (1 out of 1 patent)

Core Competencies:

Fluorine Doped Films

Electric Furnace Heater

CVD Thin-Film

High Temperature Furnace

Wafer Handling Station

Mass-Flow Controller

Diffusion Furnace

Chemical Vapor Deposition

Microcontroller

Heat Processing

Heater Assembly

Modular System

25 patents: Sort by Forward Citations

1. 5124180 - Method for the formation of fluorine doped metal oxide films (1992-06-23),

2. 4872799 - Boat transfer and queuing furnace elevator and method (1989-10-10),

3. 4854266 - Cross-flow diffusion furnace (1989-08-08),

4. 4829282 - High efficiency high heat output electrical heater assembly (1989-05-09),

5. 4802441 - Double wall fast cool-down furnace (1989-02-07),

6. 4753192 - Movable core fast cool-down furnace (1988-06-28),

7. 4752219 - Wafer softlanding system and cooperative door assembly (1988-06-21),

8. 4701096 - Wafer handling station (1987-10-20),

9. 4687911 - Electric furnace heater (1987-08-18),

10. 4672997 - Modular, self-diagnostic mass-flow controller and system (1987-06-16),

11. 4624638 - CVD boat loading mechanism having a separable, low profile cantilevered (1986-11-25),

12. 4586898 - Multi-zone furnace system (1986-05-06),

13. 4573431 - Modular V-CVD diffusion furnace (1986-03-04),

14. 4556584 - Method for providing substantially waste-free chemical vapor deposition (1985-12-03),

15. 4484538 - Apparatus for providing depletion-free uniform thickness CVD thin-film (1984-11-27),

Btu Engineering Corporation, based in North Billerica, MA, specializes in the design and manufacturing of advanced thermal management solutions. The company focuses on developing innovative technologies for various industries, including aerospace, automotive, and electronics, aiming to enhance energy efficiency and performance. With a commitment to research and development, Btu Engineering leverages its expertise to address complex thermal challenges, providing tailored solutions that meet the evolving needs of its clients.

Profile summary based on public USPTO records.

Company Badge

USPTO Data Jan 1 1976 - Sep 29 2026

25 Patents

#7 in North Billerica, MA

#804 in Massachusetts

#13,350 in US

#25,681 in the World

North Billerica, MA, United States of America

Btu Engineering Corporation

Forward Citations = 1,751

17 inventors:

Jacob Howard Beck (8 out of 9 patents)

Arthur Waugh (5 out of 7 patents)

Robert F Sarkozy (5 out of 6 patents)

4. Daniel J Fisher (3 out of 4 patents)

5. John H Fabricius (3 out of 3 patents)

Please report any incorrect information to [email protected]

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