The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 1987
Filed:
Oct. 29, 1984
Applicant:
Inventors:
Donald Landis, Hollis, NH (US);
John H Fabricius, Westford, MA (US);
Assignee:
BTU Engineering Corporation, North Billerica, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
137554 ; 73204 ; 340606 ;
Abstract
A modular, self-diagnostic mass-flow controller and system includes separable and readily interchangeable housing portions cooperative to provide mass-flow controller component repair and replacement without further system disconnection. The mass-flow controller includes dual mass-flow sensors and associated electronics including a processor operative in response to the dual mass-flow sensor and other signals to both provide mass-flow control of a controlled gas and self-diagnostics to ensure that the controller is operating in its intended manner.