John H Fabricius

Title: Innovations of John H Fabricius

Introduction

John H Fabricius is a notable inventor based in Westford, MA (US), recognized for his contributions to the field of semiconductor technology. He holds a total of three patents, showcasing his innovative spirit and technical expertise.

Latest Patents

One of his latest patents is the Cross-flow diffusion furnace. This invention features a longitudinally extending cross-flow liner within a cylindrical reaction vessel, which works in conjunction with gas injectors to provide transversely flowing gas across vertically oriented semiconductor wafers. This design aims to eliminate depletion phenomena and downstream wafer pollution caused by particulates and unreacted gases, ensuring uniformly coated wafers and repeatability from batch to batch.

Another significant patent is the Modular, self-diagnostic mass-flow controller and system. This invention includes separable housing portions that allow for easy repair and replacement of mass-flow controller components without disconnecting the entire system. The controller is equipped with dual mass-flow sensors and electronics that enable both mass-flow control and self-diagnostics, ensuring optimal operation.

Career Highlights

John H Fabricius is currently associated with Btu Engineering Corporation, where he applies his innovative ideas to advance technology in the semiconductor industry. His work has significantly impacted the efficiency and reliability of semiconductor manufacturing processes.

Collaborations

Throughout his career, John has collaborated with notable colleagues such as Morris Simson and Ronnie Browne, contributing to various projects and innovations in the field.

Conclusion

John H Fabricius exemplifies the spirit of innovation through his patents and contributions to semiconductor technology. His work continues to influence the industry, paving the way for advancements in manufacturing processes.