Btu Engineering Corporation

John H Fabricius

Arthur Waugh

Robert F Sarkozy

Donald Landis

Morris Simson

Donald G Landis

Chiu K Lai

Martin A Beck

Ronnie Browne

A longitudinally extending cross-flow liner within a longitudinally extending cylindrical reaction vessel cooperates with at least one longitudinally extending gas injector within the cross-flow liner to provide transversely flowing gas across the surfaces of vertically oriented semiconductor wafers in such a way as to substantially eliminate both depletion phenomenon and downstream wafer pollution caused from particulates, unreacted reactant gas, and other contaminants and to provide uniformly coated wafers in a batch and repeatability batch to batch.

Cross-flow diffusion furnace

A modular, self-diagnostic mass-flow controller and system includes separable and readily interchangeable housing portions cooperative to provide mass-flow controller component repair and replacement without further system disconnection. The mass-flow controller includes dual mass-flow sensors and associated electronics including a processor operative in response to the dual mass-flow sensor and other signals to both provide mass-flow control of a controlled gas and self-diagnostics to ensure that the controller is operating in its intended manner.

Modular, self-diagnostic mass-flow controller and system

An automatic microprocessor-based control system for a diffusion furnace in which the controller is dedicated to a single associated diffusion tube to provide all monitoring and control functions necessary for a variety of diffusion processes. The controller provides direct digital control of time, temperature and gas flow, and can be readily operated with a variety of control algorithms.

Diffusion furnace microcontroller

Growing community of inventors

Westford, MA, United States of America

John H Fabricius