The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 1989
Filed:
Jun. 16, 1987
Daniel J Fisher, Jr, Chelmsford, MA (US);
BTU Engineering Corporation, North Billerica, MA (US);
Abstract
A novel boat transfer and queuing furnace elevator and method includes an X, Z, and Y assembly movable between furnace processing tubes, a furnace loading island, and an operator work station. The X, Z, and Y assembly includes X, Z, and Y drive motors mounted in a region below the region defined by the operative transfer, queuing, loading, and unloading movement paths for preventing motor-produced pollutants from contaminating wafer-loaded boats. The X, Z, and Y assembly includes X, Z, and Y linkages having resilient members mounted along moving and mounting interfaces thereof for providing shock and vibration isolation. In one embodiment, the work station and furnace are arranged in-line, and in another embodiment the work station and furnace are arranged in laterally offset relation. In both embodiments, the X, Z, and Y assembly has a multi-mode operation capability that minimizes 'dead time' between transfers and significantly improves system processing throughput.