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Asm Microchemistry Oy

USPTO Granted Patents = 19

Forward Citations = 4,077

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25 inventors (with patents filed for the assignee):

Pekka T Soininen (11 out of 94 patents)

Suvi P Haukka (6 out of 175 patents)

Kai-Erik Elers (5 out of 47 patents)

4. Ivo Johannes Raaijmakers (4 out of 106 patents)

5. Vaino Kilpi (3 out of 11 patents)

6. Ville Antero Saanila (3 out of 18 patents)

7. Sari Johanna Kaipio (3 out of 12 patents)

8. Janne Kesälä (3 out of 3 patents)

9. Sven Lindfors (2 out of 32 patents)

10. Marko J Tuominen (2 out of 80 patents)

11. Leif Keto (2 out of 7 patents)

12. Matti Putkonen (2 out of 7 patents)

13. Niklas Bondestam (2 out of 7 patents)

14. Mikko Ritala (1 out of 76 patents)

15. Markku Leskelä (1 out of 72 patents)

19 patents: Sort by Forward Citations

1. 6881263 - Method of growing a thin film onto a substrate (2005-04-19),

2. 6777353 - Process for producing oxide thin films (2004-08-17),

3. 6759325 - Sealing porous structures (2004-07-06),

4. 6699524 - Method and apparatus for feeding gas phase reactant into a reaction chamber (2004-03-02),

5. 6689210 - Apparatus for growing thin films (2004-02-10),

6. 6632279 - Method for growing thin oxide films (2003-10-14),

7. 6599572 - Process for growing metalloid thin films utilizing boron-containing reducing agents (2003-07-29),

8. 6579374 - Apparatus for fabrication of thin films (2003-06-17),

9. 6562140 - Apparatus for fabrication of thin films (2003-05-13),

10. 6551406 - Apparatus for growing thin films (2003-04-22),

11. 6548424 - Process for producing oxide thin films (2003-04-15),

12. 6534395 - Method of forming graded thin films using alternating pulses of vapor phase reactants (2003-03-18),

13. 6506352 - Method for removing substances from gases (2003-01-14),

14. 6492283 - Method of forming ultrathin oxide layer (2002-12-10),

15. 6482740 - Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOH (2002-11-19),

ASM Microchemistry is a leading supplier of advanced thin film deposition systems and solutions for the global semiconductor industry. With over 50 years of experience, ASM delivers innovative and high-performance equipment for a range of applications including atomic layer deposition (ALD), epitaxy, and chemical vapor deposition (CVD). The company's technology enables the fabrication of state-of-the-art semiconductor devices used in various electronic applications such as smartphones, 5G networks, and advanced sensors. ASM Microchemistry is committed to continuous innovation and provides excellent customer support to drive the progress of the semiconductor industry.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 23 2025

19 Patents

#44 in Espoo

#173 in Finland

#31,684 in the World

Asm Microchemistry Oy

Forward Citations = 4,077

25 inventors:

Pekka T Soininen (11 out of 94 patents)

Suvi P Haukka (6 out of 175 patents)

Kai-Erik Elers (5 out of 47 patents)

4. Ivo Johannes Raaijmakers (4 out of 106 patents)

5. Vaino Kilpi (3 out of 11 patents)

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