For the Inventor, By the Inventor

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Anaheim, CA, United States of America

Advanced Thermal Sciences Corporation

USPTO Granted Patents = 22

EPO Patents = 3

Forward Citations = 1,453

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15 inventors (with patents filed for the assignee):

Kenneth Wesley Cowans (16 out of 46 patents)

William W Cowans (8 out of 24 patents)

Kallol Bera (7 out of 84 patents)

4. Paul Brillhart (7 out of 61 patents)

5. Glenn Zubillaga (7 out of 25 patents)

6. Douglas H Burns (7 out of 21 patents)

7. Daniel John Hoffman (7 out of 114 patents)

8. Richard Charles Fovell (7 out of 47 patents)

9. Douglas A Buchberger, Jr (7 out of 90 patents)

10. Hamid Tavassoli (5 out of 31 patents)

11. Isaac Millan (5 out of 11 patents)

12. Matthew Antoniou (1 out of 2 patents)

13. Williams W Cowans (1 out of 1 patent)

14. Isaac Millian (1 out of 1 patent)

15. Bryan Christofferson (1 out of 1 patent)

22 patents: Sort by Forward Citations

1. 8157951 - Capacitively coupled plasma reactor having very agile wafer temperature control (2012-04-17),

2. 8092639 - Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes (2012-01-10),

3. 8092638 - Capacitively coupled plasma reactor having a cooled/heated wafer support with uniform temperature distribution (2012-01-10),

4. 8034180 - Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor (2011-10-11),

5. 8021521 - Method for agile workpiece temperature control in a plasma reactor using a thermal model (2011-09-20),

6. 8012304 - Plasma reactor with a multiple zone thermal control feed forward control apparatus (2011-09-06),

7. 7988872 - Method of operating a capacitively coupled plasma reactor with dual temperature control loops (2011-08-02),

8. 7765820 - Thermal control system and method (2010-08-03),

9. 7661460 - Heat exchangers for fluid media (2010-02-16),

10. 7442275 - Lateral temperature equalizing system for large area surfaces during processing (2008-10-28),

11. 7415835 - Thermal control system and method (2008-08-26),

12. 7337625 - Thermal control systems for process tools requiring operation over wide temperature ranges (2008-03-04),

13. 7243500 - Heat exchanger and temperature control unit (2007-07-17),

14. 7195693 - Lateral temperature equalizing system for large area surfaces during processing (2007-03-27),

15. 7178353 - Thermal control system and method (2007-02-20),

Advanced Thermal Sciences Corporation (ATS) is a leading provider of innovative thermal management solutions for various industries. With expertise in thermal engineering and extensive manufacturing capabilities, ATS designs and manufactures high-performance thermal management systems to meet the unique needs of its customers. ATS specializes in developing advanced cooling solutions for electronics, semiconductor, automotive, aerospace, and other industries where temperature control is critical. By leveraging cutting-edge technologies and industry-leading practices, ATS ensures efficient thermal management, enhanced product reliability, and improved overall performance for its clients.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Sep 15 2026

Advanced Thermal Sciences Corporation

22 Patents

#15 in Anaheim, CA

#3,579 in California

#15,000 in US

#28,686 in the World

Anaheim, CA, United States of America

Advanced Thermal Sciences Corporation

Forward Citations = 1,453

15 inventors:

Kenneth Wesley Cowans (16 out of 46 patents)

William W Cowans (8 out of 24 patents)

Kallol Bera (7 out of 84 patents)

4. Paul Brillhart (7 out of 61 patents)

5. Glenn Zubillaga (7 out of 25 patents)

Please report any incorrect information to [email protected]

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