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For the Inventor, By the Inventor

Anaheim, CA, United States of America

Advanced Thermal Sciences Corporation


USPTO Granted Patents = 22


Forward Citations = 1,419

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15 inventors (with patents filed for the assignee):

goldMedal Kenneth Wesley Cowans (16 out of 46 patents)

silverMedal William W Cowans (8 out of 24 patents)

bronzeMedal Kallol Bera (7 out of 78 patents)

4.  Paul Brillhart (7 out of 58 patents)

5.  Glenn Zubillaga (7 out of 25 patents)

6.  Douglas H Burns (7 out of 21 patents)

7.  Daniel John Hoffman (7 out of 113 patents)

8.  Richard Charles Fovell (7 out of 47 patents)

9.  Douglas A Buchberger, Jr (7 out of 88 patents)

10.  Hamid Tavassoli (5 out of 30 patents)

11.  Isaac Millan (5 out of 11 patents)

12.  Matthew Antoniou (1 out of 2 patents)

13.  Williams W Cowans (1 out of 1 patent)

14.  Isaac Millian (1 out of 1 patent)

15.  Bryan Christofferson (1 out of 1 patent)


22 patents:

1. 8157951 - Capacitively coupled plasma reactor having very agile wafer temperature control (2012-04-17),
2. 8092639 - Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes (2012-01-10),
3. 8092638 - Capacitively coupled plasma reactor having a cooled/heated wafer support with uniform temperature distribution (2012-01-10),
4. 8034180 - Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor (2011-10-11),
5. 8021521 - Method for agile workpiece temperature control in a plasma reactor using a thermal model (2011-09-20),
6. 8012304 - Plasma reactor with a multiple zone thermal control feed forward control apparatus (2011-09-06),
7. 7988872 - Method of operating a capacitively coupled plasma reactor with dual temperature control loops (2011-08-02),
8. 7765820 - Thermal control system and method (2010-08-03),
9. 7661460 - Heat exchangers for fluid media (2010-02-16),
10. 7442275 - Lateral temperature equalizing system for large area surfaces during processing (2008-10-28),
11. 7415835 - Thermal control system and method (2008-08-26),
12. 7337625 - Thermal control systems for process tools requiring operation over wide temperature ranges (2008-03-04),
13. 7243500 - Heat exchanger and temperature control unit (2007-07-17),
14. 7195693 - Lateral temperature equalizing system for large area surfaces during processing (2007-03-27),
15. 7178353 - Thermal control system and method (2007-02-20),
Advanced Thermal Sciences Corporation (ATS) is a leading provider of innovative thermal management solutions for various industries. With expertise in thermal engineering and extensive manufacturing capabilities, ATS designs and manufactures high-performance thermal management systems to meet the unique needs of its customers. ATS specializes in developing advanced cooling solutions for electronics, semiconductor, automotive, aerospace, and other industries where temperature control is critical. By leveraging cutting-edge technologies and industry-leading practices, ATS ensures efficient thermal management, enhanced product reliability, and improved overall performance for its clients.
This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 16 2025

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22 Patents

#14 in Anaheim, CA

#3,451 in California

#14,514 in US

#27,881 in the World

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Anaheim, CA, United States of America

Advanced Thermal Sciences Corporation

Forward Citations = 1,419

15 inventors:

goldMedal Kenneth Wesley Cowans (16 out of 46 patents)

silverMedal William W Cowans (8 out of 24 patents)

bronzeMedal Kallol Bera (7 out of 78 patents)

4.  Paul Brillhart (7 out of 58 patents)

5.  Glenn Zubillaga (7 out of 25 patents)

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