The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2011
Filed:
Apr. 24, 2006
Paul Lukas Brillhart, Pleasanton, CA (US);
Richard Fovell, San Jose, CA (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Douglas H. Burns, Saratoga, CA (US);
Kallol Bera, San Jose, CA (US);
Daniel J. Hoffman, Saratoga, CA (US);
Paul Lukas Brillhart, Pleasanton, CA (US);
Richard Fovell, San Jose, CA (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Douglas H. Burns, Saratoga, CA (US);
Kallol Bera, San Jose, CA (US);
Daniel J. Hoffman, Saratoga, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Advanced Thermal Sciences Corporation, Anaheim, CA (US);
Abstract
A method of controlling the temperature of a workpiece on a workpiece support in a plasma reactor includes placing coolant in a flow channel thermally coupled to the workpiece support, supporting a thermally conductive gas between the workpiece and the workpiece support to establish a backside gas pressure, providing sensors to measure the temperature of the workpiece support and the workpiece, and determining whether the rate of change in workpiece temperature is less or more than a rate limited by a thermal mass of the workpiece support. If the rate is less or equal, the thermal conditions of the coolant in the flow channel are changed to reduce a difference between the measured workpiece support temperature and a target workpiece support temperature. If the rate is more, the pressure of the thermally conductive gas is changed to reduce a difference between the measured workpiece temperature and a target workpiece temperature.