The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Apr. 21, 2006
Douglas A. Buchberger, Jr., Livermore, CA (US);
Paul Lukas Brillhart, Pleasanton, CA (US);
Richard Fovell, San Jose, CA (US);
Hamid Tavassoli, Cupertino, CA (US);
Douglas H. Burns, Saratoga, CA (US);
Kallol Bera, San Jose, CA (US);
Daniel J. Hoffman, Saratoga, CA (US);
Kenneth W. Cowans, Fullerton, CA (US);
Williams W. Cowans, Fullerton, CA (US);
Glenn W. Zubillaga, Canyon Lake, CA (US);
Isaac Millian, Anaheim, CA (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Paul Lukas Brillhart, Pleasanton, CA (US);
Richard Fovell, San Jose, CA (US);
Hamid Tavassoli, Cupertino, CA (US);
Douglas H. Burns, Saratoga, CA (US);
Kallol Bera, San Jose, CA (US);
Daniel J. Hoffman, Saratoga, CA (US);
Kenneth W. Cowans, Fullerton, CA (US);
Williams W. Cowans, Fullerton, CA (US);
Glenn W. Zubillaga, Canyon Lake, CA (US);
Isaac Millian, Anaheim, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Advanced Thermal Sciences Corporation, Anaheim, CA (US);
Abstract
A method of processing a workpiece in a plasma reactor having an electrostatic chuck for holding a workpiece in a chamber of the reactor includes providing a thermally conductive gas under pressure between a backside of the workpiece and a top surface of the electrostatic chuck, controlling the temperature of the electrostatic chuck, defining a desired workpiece temperature, measuring a current workpiece temperature or temperature related to the workpiece temperature and inputting the measured temperature to a thermal model representative of the electrostatic chuck. The method further includes determining from the thermal model a change in the pressure of the thermally conductive gas that would at least reduce the difference between the measured temperature and the desired temperature, and changing the pressure of the thermally conductive gas in accordance with the change determined from the thermal model.