The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Jul. 14, 2015
Lam Research Corporation, Fremont, CA (US);
Jun Qian, Sherwood, OR (US);
Hu Kang, Tualatin, OR (US);
Purushottam Kumar, Hillsboro, OR (US);
Chloe Baldasseroni, Portland, OR (US);
Heather Landis, Tigard, OR (US);
Andrew Kenichi Duvall, Portland, OR (US);
Mohamed Sabri, Beaverton, OR (US);
Ramesh Chandrasekharan, Portland, OR (US);
Karl Leeser, Lake Oswego, OR (US);
Shankar Swaminathan, Hillsboro, OR (US);
David Smith, Lake Oswego, OR (US);
Jeremiah Baldwin, Tualatin, OR (US);
Eashwar Ranganathan, Tigard, OR (US);
Adrien LaVoie, Portland, OR (US);
Frank Pasquale, Tualatin, OR (US);
Jeongseok Ha, Gyeonggi-do, KR;
Ingi Bae, Gyeonggi-do, KR;
LAM RESEARCH CORPORATION, Fremont, CA (US);
Abstract
A vapor delivery system includes an ampoule to store liquid precursor and a heater to partially vaporize the liquid precursor. A first valve communicates with a push gas source and the ampoule. A second valve supplies vaporized precursor to a heated injection manifold. A valve manifold includes a first node in fluid communication with an outlet of the heated injection manifold, a third valve having an inlet in fluid communication with the first node and an outlet in fluid communication with vacuum, a fourth valve having an inlet in fluid communication with the first node and an outlet in fluid communication with a second node, a fifth valve having an outlet in fluid communication with the second node, and a sixth valve having an outlet in fluid communication with the second node. A gas distribution device is in fluid communication with the second node.