This inventor holds 1 USPTO granted patent. Top assignee: Lam Research Corporation. Active years: 2018.
Company Filing History:
Years Active: 2018
Title: Ingi Bae: Innovator in Vapor Delivery Systems
Introduction
Ingi Bae is a notable inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of substrate processing systems, particularly in vapor delivery technologies. His innovative approach has led to the development of a unique patent that enhances the efficiency of vapor delivery systems.
Latest Patents
Ingi Bae holds a patent for "Systems and methods for vapor delivery in a substrate processing system." This patent describes a vapor delivery system that includes an ampoule for storing liquid precursor and a heater to partially vaporize the liquid precursor. The system features a first valve that communicates with a push gas source and the ampoule, along with a second valve that supplies vaporized precursor to a heated injection manifold. The design includes a valve manifold with multiple nodes and valves to ensure effective gas distribution.
Career Highlights
Ingi Bae is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on advancing technologies that improve substrate processing, which is crucial for the manufacturing of semiconductor devices. His expertise and innovative mindset have positioned him as a valuable asset to his team.
Collaborations
Ingi collaborates with talented coworkers, including Jun Qian and Hu Kang. Their combined efforts contribute to the development of cutting-edge technologies in the field of vapor delivery systems.
Conclusion
Ingi Bae's contributions to vapor delivery systems exemplify the spirit of innovation in the semiconductor industry. His patent and work at Lam Research Corporation highlight his commitment to advancing technology and improving manufacturing processes.