The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Feb. 22, 2013
Kla-tencor Corporation, Milpitas, CA (US);
Gregory R. Brady, San Jose, CA (US);
Andrei V. Shchegrov, Campbell, CA (US);
Lawrence D. Rotter, Pleasanton, CA (US);
Derrick Shaughnessy, San Jose, CA (US);
Anatoly Shchemelinin, Pleasanton, CA (US);
Ilya Bezel, Sunnyvale, CA (US);
Muzammil A. Arain, Milpitas, CA (US);
Anatoly A. Vasiliev, Sunnyvale, CA (US);
James Andrew Allen, Elk Grove, CA (US);
Oleg Shulepov, San Jose, CA (US);
Andrew V. Hill, Sunnyvale, CA (US);
Ohad Bachar, Timrat, IL;
Moshe Markowitz, Haifa, IL;
Yaron Ish-Shalom, Kyryat Tivon, IL;
Ilan Sela, Haifa, IL;
Amnon Manassen, Haifa, IL;
Alexander Svizher, Haifa, IL;
Maxim Khokhlov, Haifa, IL;
Avi Abramov, Haifa, IL;
Oleg Tsibulevsky, Migdal Haemeq, IL;
Daniel Kandel, Aseret, IL;
Mark Ghinovker, Yoqneam Ilit, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.