The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2012
Filed:
Sep. 21, 2007
Chien-huei (Adam) Chen, San Jose, CA (US);
Barry Becker, San Jose, CA (US);
Hong Chen, San Ramon, CA (US);
Michael Van Riet, Morgan Hill, CA (US);
Chris Maher, Campbell, CA (US);
Stephanie Chen, Fremont, CA (US);
Suryanarayana Tummala, Tirupathi, IN;
Yong Zhang, Cupertino, CA (US);
Chien-Huei (Adam) Chen, San Jose, CA (US);
Barry Becker, San Jose, CA (US);
Hong Chen, San Ramon, CA (US);
Michael Van Riet, Morgan Hill, CA (US);
Chris Maher, Campbell, CA (US);
Stephanie Chen, Fremont, CA (US);
Suryanarayana Tummala, Tirupathi, IN;
Yong Zhang, Cupertino, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe are provided. One method includes separating defects into bins based on regions in which the defects are located, defect types, and values of the defects for parameter(s) of a detection algorithm. The method also includes determining a number of the defects to be selected from each bin by distributing a user-specified target number of defects across the bins. In addition, the method includes selecting defects from the bins based on the determined numbers thereby creating a defect sample for use in selecting values of parameter(s) of the detection algorithm for use in the inspection recipe.