The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2008
Filed:
Jul. 25, 2007
Hidetoshi Nishiyama, Fujisawa, JP;
Minori Noguchi, Mitsukaidou, JP;
Yoshimasa Ohshima, Yokohama, JP;
Akira Hamamatsu, Yokohama, JP;
Kenji Watanabe, Ome, JP;
Tetsuya Watanabe, Honjo, JP;
Takahiro Jingu, Takasaki, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Minori Noguchi, Mitsukaidou, JP;
Yoshimasa Ohshima, Yokohama, JP;
Akira Hamamatsu, Yokohama, JP;
Kenji Watanabe, Ome, JP;
Tetsuya Watanabe, Honjo, JP;
Takahiro Jingu, Takasaki, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An apparatus for inspecting particles and/or pattern defects of an object under inspection. Data processing means obtains information on size of the particles and/or the pattern defects from an intensity of the scattered light detected by the light detecting means by referring to a relationship between an intensity of scattered light from a standard particle and a size of the standard particle, and using a calibration coefficient for compensating for a change in intensity of the light of the illuminating means from a predetermined intensity.