The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2005
Filed:
Aug. 29, 2002
Hidetoshi Nishiyama, Fujisawa, JP;
Minori Noguchi, Mitsukaidou, JP;
Yoshimasa Ohshima, Yokohama, JP;
Akira Hamamatsu, Yokohama, JP;
Kenji Watanabe, Ome, JP;
Tetsuya Watanabe, Honjo, JP;
Takahiro Jingu, Takasaki, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Minori Noguchi, Mitsukaidou, JP;
Yoshimasa Ohshima, Yokohama, JP;
Akira Hamamatsu, Yokohama, JP;
Kenji Watanabe, Ome, JP;
Tetsuya Watanabe, Honjo, JP;
Takahiro Jingu, Takasaki, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi High-Tech Electronics Engineering Co., Ltd., Tokyo, JP;
Abstract
An apparatus for optically inspecting particles and/or defects correlates sizes of particles and/or defects to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.