The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2003
Filed:
Apr. 27, 2000
Mari Nozoe, Hino, JP;
Hiroyuki Shinada, Chofu, JP;
Kenji Watanabe, Ome, JP;
Keiichi Saiki, Hitachinaka, JP;
Aritoshi Sugimoto, Tokyo, JP;
Hiroshi Morioka, Higashimurayama, JP;
Maki Tanaka, Yokohama, JP;
Hiroshi Miyai, Hitachi, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
In order to obtain optimum irradiation conditions of an electron beam according to the material and structure of a circuit pattern to be inspected and the kind of a failure to be detected and inspect under the optimum conditions without delay of the inspection time, an inspection device for irradiating the electron beam to the sample board which is a sample, detecting generated secondary electrons by the detector , storing obtained signals sequentially in the storage, comparing the same pattern stored in the storage by the comparison calculation unit, and extracting a failure by comparing the predetermined threshold value with the comparison signal by the failure decision unit is provided, wherein the optimum value of the irradiation energy is stored in the data base inside the device beforehand according to the structure of a sample and a recommended value of the irradiation energy suited to inspection can be searched for by inputting or selecting the irradiation energy by a user or inputting information regarding the structure of an article to be inspected.