The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 1996
Filed:
Oct. 28, 1994
Mitsuhiro Nanbu, Kumamoto-ken, JP;
Naruaki Iida, Kumamoto, JP;
Hideaki Gotou, Kumamoto-ken, JP;
Masanori Tateyama, Kumamoto, JP;
Yuji Yoshimoto, Kumamoto-ken, JP;
Tomoko Ishimoto, Kumamoto, JP;
Hidetami Yaegashi, Tokyo, JP;
Yasunori Kawakami, Kikuchi, JP;
Takahide Fukuda, Kumamoto, JP;
Akihiro Fujimoto, Kumamoto-ken, JP;
Takashi Takekuma, Yamaga, JP;
Hiroyuki Matsukawa, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Kyushu Limited, Tosu, JP;
Abstract
A substrate processing apparatus according to this invention includes an interface section having a first transfer member for transferring an object from a coating process section for applying a process solution to the object in accordance with a single sheet process to an object holding member, and a moving member for detachably supplying a plurality of object holding member and simultaneously moving the plurality of object holding member, and a heat-treatment section having a second transfer member for transferring the object placed on the object holding member to a heat-treatment section for heat-treating the plurality of objects, which have undergone the coating process, in accordance with a batch process.