Mitsuhiro Nanbu

Title: Mitsuhiro Nanbu: Innovator in Semiconductor Processing

Introduction

Mitsuhiro Nanbu is a prominent inventor based in Kumamoto-ken, Japan. He has made significant contributions to the field of semiconductor processing, holding a total of 3 patents. His innovative approaches have advanced the technology used in wafer processing, making him a notable figure in the industry.

Latest Patents

One of Mitsuhiro Nanbu's latest patents is a method of substrate processing to form a film on multiple target objects. This method involves subjecting a plurality of wafers to coating and heating treatments. A first boat is placed on a stage arranged in an interface section, capable of containing the wafers stacked at intervals in a vertical direction. The stage can move horizontally and has multiple positions for placing various boats. The wafers are conveyed from a supply section to a coating section, where they undergo a coating treatment one by one. After the coating treatment, the wafers are conveyed to the interface section and loaded into the first boat. The first boat is then moved to a transfer position, where it is conveyed into a heating section for simultaneous heating treatment of the wafers.

Another significant patent is a semiconductor wafer processing apparatus that includes a localized coating and heating treatment system. This apparatus features a coating section for individual wafer treatment and a heating section for simultaneous treatment of multiple wafers. The interface section between these two sections allows for efficient loading and processing of the wafers. The design includes a surrounding space formed by a casing, which is equipped with a circulation line and a dehumidifier to ensure optimal conditions during processing.

Career Highlights

Mitsuhiro Nanbu has worked with notable companies in the semiconductor industry, including Tokyo Electron Limited and Tokyo Electron Kyushu Limited. His experience in these organizations has contributed to his expertise in wafer processing technologies.

Collaborations

Throughout his career, Mitsuhiro has collaborated with talented individuals such as Naruaki Iida and Hideaki Gotou. These collaborations have further enriched his work and innovations in the field.

Conclusion

Mitsuhiro Nanbu's contributions to semiconductor processing through his patents and career achievements highlight his role as an influential inventor. His innovative methods and apparatus designs continue to impact the industry positively.