Hideaki Gotou

Title: Innovations by Inventor Hideaki Gotou

Introduction

Hideaki Gotou is a notable inventor based in Kumamoto-ken, Japan. He has made significant contributions to the field of semiconductor processing, holding a total of 3 patents. His work focuses on methods and apparatuses that enhance the efficiency of wafer processing.

Latest Patents

One of Gotou's latest patents is a method of substrate processing to form a film on multiple target objects. This innovative method involves subjecting a plurality of wafers to coating and heating treatments. A first boat is placed on a stage in an interface section, capable of containing the wafers stacked at intervals in a vertical direction. The stage can move horizontally and has multiple positions for placing various boats. The wafers are conveyed from a supply section to a coating section, where they undergo a coating treatment one by one. After the coating treatment, the wafers are moved to the interface section and loaded into the first boat. This boat is then conveyed to a heating section, where the wafers receive simultaneous heating treatment.

Another significant patent by Gotou is a semiconductor wafer processing apparatus that includes localized features. This apparatus is designed for subjecting multiple wafers to coating and heating treatments. It consists of a coating section for individual coating treatments and a heating section for simultaneous heating of the coated wafers. The interface section between these two areas facilitates the loading of wafers into a boat, which is surrounded by a casing that forms a controlled environment. A circulation line with an air supply and exhaust system is integrated to maintain optimal conditions, including localized dehumidification.

Career Highlights

Hideaki Gotou has worked with prominent companies in the semiconductor industry, including Tokyo Electron Limited and Tokyo Electron Kyushu Limited. His experience in these organizations has contributed to his expertise in wafer processing technologies.

Collaborations

Throughout his career, Gotou has collaborated with talented individuals such as Mitsuhiro Nanbu and Naruaki Iida. These collaborations have likely enriched his work and led to further innovations in the field.

Conclusion

Hideaki Gotou's contributions to semiconductor processing through his patents and career experiences highlight his role as an influential inventor. His innovative methods and apparatuses continue to impact the industry positively.