Tomoko Ishimoto

Title: The Innovative Contributions of Tomoko Ishimoto

Introduction

Tomoko Ishimoto is a prominent inventor based in Kumamoto, Japan. She has made significant contributions to the field of semiconductor processing, holding a total of 3 patents. Her work focuses on methods and apparatuses that enhance the efficiency of wafer processing.

Latest Patents

One of her latest patents is a method of substrate processing to form a film on multiple target objects. This innovative method involves subjecting a plurality of wafers to coating and heating treatments. A first boat is placed on a stage in an interface section, capable of containing the wafers stacked at intervals in a vertical direction. The stage can move horizontally and has multiple positions for placing various boats. The wafers are conveyed from a supply section to a coating section, where they undergo a coating treatment one by one. After the coating treatment, the wafers are moved to the interface section and loaded into the first boat. The first boat is then conveyed to a heating section, where the wafers receive simultaneous heating treatment.

Another notable patent is a semiconductor wafer processing apparatus that includes localized features. This apparatus is designed for subjecting multiple wafers to coating and heating treatments. It consists of a coating section for individual coating treatments and a heating section for simultaneous heating of the coated wafers. The interface section between these two areas is crucial for the efficient transfer and processing of the wafers. The apparatus also includes a dehumidifier for localized dehumidification, ensuring optimal conditions for wafer processing.

Career Highlights

Tomoko Ishimoto has worked with notable companies in the semiconductor industry, including Tokyo Electron Limited and Tokyo Electron Kyushu Limited. Her experience in these organizations has contributed to her expertise in wafer processing technologies.

Collaborations

Throughout her career, Tomoko has collaborated with talented individuals such as Mitsuhiro Nanbu and Naruaki Iida. These collaborations have further enriched her work and innovations in the field.

Conclusion

Tomoko Ishimoto's contributions to semiconductor processing through her innovative patents and collaborations highlight her significant role in advancing technology in this field. Her work continues to influence the efficiency and effectiveness of wafer processing methods.