The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2025
Filed:
Nov. 05, 2020
Kla Corporation, Milpitas, CA (US);
Roie Volkovich, Hadera, IL;
Nachshon Rothman, DN Oshrat, IL;
Yossi Simon, Haifa, IL;
Anna Golotsvan, Qiryat Tivon, IL;
Vladimir Levinski, Migdal HaEmek, IL;
Nireekshan K. Reddy, Tel Aviv, IL;
Amnon Manassen, Haifa, IL;
Daria Negri, Nesher, IL;
Yuri Paskover, Binyamina, IL;
KLA Corporation, Milpitas, CA (US);
Abstract
A system for use with a misregistration metrology tool (MMT), the system including a database including a plurality of process variation (PV) categories and a corresponding plurality of parameter sets and a process variation accommodation engine (PVAE) including a measurement site process variation category associator (MSPVCA) operative to associate a measurement site being measured by the MMT, at least partially based on an MMT output relating to the measurement site, with a measurement site process variation category (MSPVC), the MSPVC being one of the plurality of PV categories, a measurement site parameter set retriever (MSPSR) operative to retrieve a measurement site parameter set (MSPS) corresponding to the MSPVC and a measurement site parameter set communicator (MSPSC) operative to communicate the MSPS to the MMT.