The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2022
Filed:
Feb. 07, 2019
Asml Netherlands B.v., Veldhoven, NL;
Evgenia Kurganova, Nijmegen, NL;
Adrianus Johannes Maria Giesbers, Vlijmen, NL;
Alexander Ludwig Klein, Eindhoven, NL;
Maxim Aleksandrovich Nasalevich, Eindhoven, NL;
Arnoud Willem Notenboom, Rosmalen, NL;
Mária Péter, Eindhoven, NL;
Pieter-Jan Van Zwol, Eindhoven, NL;
David Ferdinand Vles, Eindhoven, NL;
Sten Vollebregt, s'-Gravenhage, NL;
Willem-Pieter Voorthuijzen, 's-Hertogenbosch, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A catalyst including: a first layer including a transition metal; a base layer; and an interlayer, wherein the interlayer is disposed between the base layer and the first layer is disclosed. Also disclosed are methods for preparing a catalyst as well as for synthesizing graphene, a pellicle produced using the catalyst or methods disclosed herein, as well as a lithography apparatus including such a pellicle.