The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2019
Filed:
Dec. 05, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Gregory R. Brady, San Jose, CA (US);
Andrei V. Shchegrov, Campbell, CA (US);
Lawrence D. Rotter, Pleasanton, CA (US);
Derrick A. Shaughnessy, San Jose, CA (US);
Anatoly Shchemelinin, Bozeman, MT (US);
Ilya Bezel, Mountain View, CA (US);
Muzammil A. Arain, Milpitas, CA (US);
Anatoly A. Vasiliev, Sunnyvale, CA (US);
James Andrew Allen, Elk Grove, CA (US);
Oleg Shulepov, San Jose, CA (US);
Andrew V. Hill, Berkley, CA (US);
Ohad Bachar, Timrat, IL;
Moshe Markowitz, Haifa, IL;
Yaron Ish-Shalom, Kyryat Tivon, IL;
Ilan Sela, Haifa, IL;
Amnon Manassen, Haifa, IL;
Alexander Svizher, Haifa, IL;
Maxim Khokhlov, Haifa, IL;
Avi Abramov, Haifa, IL;
Oleg Tsibulevsky, Migdal Haemeq, IL;
Daniel Kandel, Aseret, IL;
Mark Ghinovker, Yoqneam Ilit, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.