The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2018
Filed:
Feb. 24, 2016
Intel Corporation, Santa Clara, CA (US);
Qing Ma, San Jose, CA (US);
Valluri Rao, Saratoga, CA (US);
Feras Eid, Chandler, AZ (US);
Kevin Lin, Beaverton, OR (US);
Weng Hong Teh, Phoenix, AZ (US);
Johanna M. Swan, Scottsdale, AZ (US);
Robert L. Sankman, Phoenix, AZ (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
A method of manufacturing an accelerometer, including placing a magnet on a substrate, laminating a dielectric layer over the magnet, forming a conductive layer over the dielectric layer, the conductive layer including a mass and a conductive path overlying the magnet, removing a portion of the dielectric layer proximate the mass and conductive path such that the mass is movable in response to acceleration of the accelerometer, and forming a dielectric layer over the mass to form a space between the mass and the dielectric layer formed over the mass sufficiently clear such that the mass remains movable.