Zongbin Wang

Title: The Innovative Contributions of Zongbin Wang

Introduction

Zongbin Wang is a prominent inventor based in Singapore, known for his significant contributions to semiconductor processing technologies. With a total of four patents to his name, Wang has made strides in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Wang's latest patents include groundbreaking technologies such as the Multi-pressure bipolar electrostatic chucking system. This exemplary semiconductor processing system features a processing chamber, a power supply, and a chuck that is partially disposed within the chamber. The chuck comprises a body that defines a vacuum port, along with first and second coplanar electrodes embedded within the body and connected to the power supply. This innovative design allows for semiconductor substrates to be secured effectively during processing, with the capability to operate under varying pressure conditions.

Another notable patent is the Step coverage dielectric technology. This method improves the deposition of silicon oxide by first exposing a patterned substrate to a silicon-containing precursor, followed by an oxygen-containing precursor, or vice versa. The use of plasma excitation for both precursors ensures that silicon oxide is deposited deep within high aspect ratio gaps, thereby enhancing step coverage and preventing disproportionate deposition near the openings.

Career Highlights

Throughout his career, Zongbin Wang has worked with esteemed organizations such as Applied Materials, Inc. and Nanyang Technological University. His experience in these institutions has allowed him to refine his expertise in semiconductor technologies and contribute to advancements in the field.

Collaborations

Wang has collaborated with notable colleagues, including Shalina Sudheeran and Arvind Sundarrajan. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Zongbin Wang's contributions to semiconductor processing through his innovative patents highlight his role as a leading inventor in the field. His work continues to influence the efficiency of semiconductor manufacturing processes, showcasing the importance of innovation in technology.