Location History:
- Santa Clara, CA (US) (2010)
- Fremont, CA (US) (2015 - 2017)
Company Filing History:
4 out of 1,787 
1 out of 641 
Years Active: 2010-2017
Title: Innovations of Zhongping Cai
Introduction
Zhongping Cai is a notable inventor based in Fremont, CA (US). He has made significant contributions to the field of substrate inspection systems, holding a total of 5 patents. His work focuses on enhancing the precision and efficiency of inspection processes in various technological applications.
Latest Patents
Cai's latest patents include a "Method and system for simultaneous tilt and height control of a substrate surface in an inspection system." This innovative system features a dynamically actuatable substrate stage assembly that allows for precise control of substrate tilt and focus. It incorporates a tilt-height detection system with both height and tilt detection subsystems, along with actuators that enable selective actuation of the substrate.
Another significant patent is the "Method and system for high speed height control of a substrate surface within a wafer inspection system." This invention facilitates high-speed height control by positioning a substrate on a dynamically adjustable stage, measuring height error values, and adjusting the actuator state to maintain the substrate surface at the imaging plane of the inspection system.
Career Highlights
Throughout his career, Zhongping Cai has worked with prominent companies such as Kla Tencor Corporation and Kla-Tencor Technologies Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas in substrate inspection technology.
Collaborations
Cai has collaborated with notable professionals in his field, including Anatoly Romanovsky and Alexander Slobodov. These collaborations have contributed to the advancement of technology in substrate inspection systems.
Conclusion
Zhongping Cai's contributions to the field of substrate inspection systems through his patents and collaborations highlight his innovative spirit and dedication to advancing technology. His work continues to influence the industry and pave the way for future advancements.