Company Filing History:

4 out of 1,787

Kla Tencor Corporation

patents

1 out of 641

Kla-tencor Technologies Corporation

patents

Years Active: 2010-2017

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9810619 - Method and system for simultaneous tilt and height control of a substrate surface in an inspection system (2017-11-07),

2. 9097645 - Method and system for high speed height control of a substrate surface within a wafer inspection system (2015-08-04),

3. 9091666 - Extended defect sizing range for wafer inspection (2015-07-28),

4. 9068952 - Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system (2015-06-30),

5. 7746462 - Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range (2010-06-29),

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For the Inventor, By the Inventor

Zhongping Cai

Location History:

Company Filing History:

Years Active: 2010-2017