Lake Oswego, OR, United States of America

Zhian He

This inventor holds 36 USPTO granted patents and 5 published patent applications, primarily in Electroplating Technology. Top assignees: Novellus Systems Incorporated, Lam Research Corporation. Active years: 2011-2026.

USPTO Granted Patents = 36 

% Patents Active = 97.2

Average Co-Inventor Count = 3.7

ph-index = 10

Forward Citations = 363(Granted Patents)


Location History:

  • Beaverton, OR (US) (2011 - 2016)
  • Tigard, OR (US) (2012 - 2016)
  • Lake Oswego, OR (US) (2016 - 2024)

Company Filing History:


Years Active: 2011-2026

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Areas of Expertise:
Electroplating
Current Density
Electrolyte Control
Plating Operations
Optical Probes
Dynamic Control
Anisotropic Current Source
Wafer Plating
Electrolyte Composition
Plating Cup
Gap Fill Process
Stability Monitoring
36 patents (USPTO):Explore Patents

Title: Zhian He: Innovator in Electrochemical Plating Technologies

Introduction: Zhian He, based in Lake Oswego, Oregon, is a prolific inventor with 34 patents to his name. His work primarily focuses on advancements in electrochemical deposition and plating technologies, contributing significantly to the fields of materials science and semiconductor manufacturing.

Latest Patents: Among his latest innovations is the "Electrochemical deposition system including optical probes." This system integrates a deposition chamber with a substrate holder that facilitates the electrochemical deposition process while employing optical probes to measure substrate reflectivity. This technology enables precise control of the deposition process, enhancing the quality and efficiency of the resulting layers.

Another noteworthy patent is focused on "Controlling plating electrolyte concentration on an electrochemical plating apparatus." This patent outlines a method for maintaining optimal concentration levels of electroplating solutions during substrate processing, ensuring consistent results and improved performance of electroplating systems.

Career Highlights: Zhian He has made significant contributions to well-known companies in the semiconductor industry, including Novellus Systems Incorporated and Lam Research Corporation. His work has been instrumental in developing cutting-edge technologies that streamline manufacturing processes and improve product quality.

Collaborations: Throughout his career, Zhian has collaborated with esteemed colleagues, such as Shantinath Ghongadi and Jingbin Feng. These partnerships have enabled exchange of ideas, leading to innovative solutions and advancements in their respective fields.

Conclusion: Zhian He's extensive patent portfolio and collaborative efforts underscore his position as a leading inventor in electrochemical technologies. His innovations not only reflect his expertise but also contribute to the ongoing evolution of manufacturing processes in the semiconductor industry. As he continues to push the boundaries of technology, Zhian remains a key figure in driving advancements in electrochemical plating and deposition systems.

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