Zhenxu Pang

Title: Zhenxu Pang: Innovator in Semiconductor Technology

Introduction

Zhenxu Pang is a prominent inventor based in Shanghai, China, known for his contributions to semiconductor technology. With a total of two patents to his name, he has made significant advancements in the field, particularly in the areas of plating apparatus and thermal treatment methods for semiconductor workpieces.

Latest Patents

Zhenxu Pang's latest patents include a "Plating apparatus for metallization on semiconductor workpiece." This invention provides a plating apparatus with multiple anode and cathode zones, allowing for individual control of the electrolyte flow field within each zone. It also features a gas bubble collector designed with pleated channels to effectively remove gas by collecting small bubbles, coalescing them, and releasing the residual gas. Additionally, a buffer zone within the gas bubble collector enables unstable microscopic bubbles to dissolve. His second patent is a "Method and apparatus for thermal treatment of semiconductor workpieces." This invention offers a rapid and uniform thermal treatment process using two closely arranged thermal treatment chambers with a retractable door. The door facilitates movement between the chambers during heating or cooling, while additional heating and cooling sources are provided for double-side thermal treatment of the semiconductor workpiece.

Career Highlights

Zhenxu Pang is currently employed at Acm Research (Shanghai) Inc., where he continues to innovate and develop new technologies in the semiconductor industry. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Zhenxu has collaborated with notable colleagues, including Yue Ma and Voha Nuch, contributing to a dynamic and innovative work environment.

Conclusion

Zhenxu Pang's contributions to semiconductor technology through his patents and work at Acm Research (Shanghai) Inc. highlight his role as a key innovator in the field. His inventions are paving the way for advancements in semiconductor manufacturing processes.