Average Co-Inventor Count = 5.46
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Acm Research (shanghai) Inc. (2 from 64 patents)
2 patents:
1. 8518224 - Plating apparatus for metallization on semiconductor workpiece
2. 8383429 - Method and apparatus for thermal treatment of semiconductor workpieces