The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Nov. 02, 2007
Yue MA, Shanghai, CN;
Xi Wang, Shanghai, CN;
Yunwen Huang, Shanghai, CN;
Zhenxu Pang, Shanghai, CN;
Voha Nuch, Shanghai, CN;
David Wang, Shanghai, CN;
Yue Ma, Shanghai, CN;
Xi Wang, Shanghai, CN;
Yunwen Huang, Shanghai, CN;
Zhenxu Pang, Shanghai, CN;
Voha Nuch, Shanghai, CN;
David Wang, Shanghai, CN;
ACM Research (Shanghai) Inc., , CN;
Abstract
The present invention provides a plating apparatus with multiple anode zones and cathode zones. The electrolyte flow field within each zone is controlled individually with independent flow control devices. A gas bubble collector whose surface is made into pleated channels is implemented for gas removal by collecting small bubbles, coalescing them, and releasing the residual gas. A buffer zone built within the gas bubble collector further allows unstable microscopic bubbles to dissolve.