Nirasaki, Japan

Yusuke Muraki


Average Co-Inventor Count = 2.8

ph-index = 4

Forward Citations = 355(Granted Patents)


Location History:

  • Hilsboro, OR (US) (2021)
  • Nirasaki, JP (2004 - 2022)
  • Yamanashi, JP (2002 - 2023)

Company Filing History:


Years Active: 2002-2023

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14 patents (USPTO):

Title: Yusuke Muraki: Innovator in Microelectronics

Introduction

Yusuke Muraki is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of microelectronics, holding a total of 14 patents. His work focuses on advanced substrate processing methods that enhance the efficiency and effectiveness of microelectronic devices.

Latest Patents

Among his latest patents is a method for gas phase etching with controllable etch selectivity of metals. This innovative method involves receiving a substrate with a working surface that exposes a metal layer, along with at least one other material. The process includes differentially etching the metal layer relative to the other material by exposing the substrate to a controlled gas-phase environment containing an anhydrous halogen compound. Another notable patent is a substrate processing method and apparatus that processes substrates with alternating silicon and silicon germanium layers. This method includes forming an oxide layer on a surface layer of a spacer layer and removing the formed oxide layer through etching.

Career Highlights

Yusuke Muraki is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work at the company has been instrumental in advancing microelectronic technologies.

Collaborations

He has collaborated with notable coworkers, including Keizo Hosoda and Masaya Odagiri, contributing to various innovative projects within the company.

Conclusion

Yusuke Muraki's contributions to microelectronics through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the field. His advancements in substrate processing methods continue to influence the development of microelectronic devices.

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