Company Filing History:
7 out of 149 
1 out of 53 Years Active: 2014-2018
Title: Yukun Lv: Innovator in Semiconductor Technology
Introduction
Yukun Lv is a prominent inventor based in Shanghai, China, known for his significant contributions to semiconductor technology. With a total of eight patents to his name, he has made remarkable advancements in the field, particularly in the areas of chemical mechanical polishing (CMP) processes and high aspect ratio patterning structures.
Latest Patents
Yukun Lv's latest patents include a simulation method of the CMP process. This innovative method involves building a CMP model and forming a matrix table of line width logarithm-density. Each intersection of the matrix table corresponds to CMP results under varying line widths and densities. The method divides a layout into multiple grids, converting the equivalent line width and density of each grid into coordinates in the matrix table. It then fits and calculates preliminary CMP simulation results based on these coordinates and adjacent intersections. The final CMP simulation results are computed by considering related weighting factors, ultimately outputting the results for the entire layout.
Another notable patent is the method for forming high aspect ratio patterning structures. This invention outlines a process that begins with forming a dielectric film ashing stop layer, followed by a first photoresist layer, a first hard mask layer, and a second photoresist layer on a semiconductor substrate. A second hard mask layer, which has a high etch selectivity ratio with the first photoresist layer, is formed using a low-temperature chemical vapor deposition process. This method effectively protects the pattern sidewall during the etching process, avoiding issues such as insufficient selectivity ratios and burrs at the edges of the pattern.
Career Highlights
Yukun Lv has worked with notable companies in the semiconductor industry, including Shanghai Huali Microelectronics Corporation and Shanghai Hua Hong Nec Electronics Company, Limited. His experience in these organizations has contributed to his expertise and innovative capabilities in semiconductor technology.
Collaborations
Yukun has collaborated with talented individuals such as Yu Ren and Jian Ding, further enhancing his work and contributions to the field.
Conclusion
Yukun Lv stands out as a significant figure in semiconductor innovation, with a strong portfolio of patents that reflect his expertise and dedication to advancing technology. His work continues to influence the industry and pave the way for future developments.
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