Company Filing History:

7 out of 441

Ulvac, Inc.

patents

3 out of 355

Canon Anelva Corporation

patents

1 out of 3

Ulvac Cryogenics Inc.

where one patent can have more than one assignee

Years Active: 2014-2024

where 'Filed Patents' based on already Granted Patents

11 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 11891685 - Vacuum processing apparatus (2024-02-06),

2. 11549173 - Sputtering apparatus (2023-01-10),

3. 11056323 - Sputtering apparatus and method of forming film (2021-07-06),

4. 10934616 - Cathode device and sputtering apparatus (2021-03-02),

5. 10844474 - Cathode unit for sputtering apparatus (2020-11-24),

6. 10763153 - Holding apparatus (2020-09-01),

7. 9561586 - Articulated robot, and conveying device (2017-02-07),

8. 9355878 - Substrate processing apparatus (2016-05-31),

9. 9346171 - Substrate transport apparatus, and system and method for manufacturing electronic device (2016-05-24),

10. 9245785 - Substrate processing apparatus (2016-01-26),

11. 8912697 - Vacuum actuator including a stator forming a part of a vacuum partition wall (2014-12-16),

Title: Innovations of Yukihito Tashiro

Introduction

Yukihito Tashiro is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of vacuum processing and sputtering technology. With a total of 11 patents to his name, Tashiro has established himself as a key figure in the industry.

Latest Patents

One of Tashiro's latest inventions is a vacuum processing apparatus designed for performing predetermined vacuum processing on a processing surface of a substrate. This apparatus includes a vacuum chamber, a processing unit, and a communication pipe that facilitates the processing of the substrate. Another notable patent is a sputtering apparatus that effectively suppresses local temperature rises at the outer peripheral part of a substrate. This apparatus features a vacuum chamber, a shield plate, and a cooling unit to maintain optimal processing conditions.

Career Highlights

Throughout his career, Tashiro has worked with notable companies such as Ulvac, Inc. and Canon Anelva Corporation. His experience in these organizations has contributed to his expertise in vacuum technology and processing systems.

Collaborations

Tashiro has collaborated with several professionals in his field, including Kazuhito Watanabe and Daisuke Kobinata. These collaborations have further enhanced his innovative capabilities and contributed to the development of advanced technologies.

Conclusion

Yukihito Tashiro's work in vacuum processing and sputtering technology showcases his innovative spirit and dedication to advancing the field. His numerous patents reflect his commitment to creating effective solutions for modern processing challenges.

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