The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Jan. 29, 2013
Canon Anelva Corporeation, Kanagawa-ken, JP;
Kazuhito Watanabe, Tama, JP;
Yukihito Tashiro, Chofu, JP;
Satoshi Nakamura, Tama, JP;
Daisuke Kobinata, Tokyo, JP;
Toshiaki Sasaki, Tokorozawa, JP;
Naoyuki Nozawa, Inagi, JP;
CANON ANELVA CORPORATION, Kanagawa-ken, JP;
Abstract
A substrate transport apparatus including a first substrate holder and a second substrate holder capable of respectively holding substrates includes a first drive arm which has first and second end portions, and is rotatable with rotation of a first drive shaft, a second drive arm which has a third end portion spaced apart from the first end portion by a first distance, and a fourth end portion spaced apart from the second end portion by a second distance, and is rotatable with rotation of a second drive shaft coaxial with the first drive shaft, two first driven arms coupled to the first substrate holder, and two second driven arms coupled to the second substrate holder.